process-simulatio

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brahmashirastra / Deal-Grove-Thermal-Oxidation

Thermal oxidation of silicon in Python: Deal–Grove kinetics with Massoud thin-oxide corrections, furnace recipe integration, Monte Carlo process capability, and oxidation-enhanced diffusion.

python monte-carlo computational-physics semiconductor-physics semiconductor process-capability deal-grove thermal-oxidation process-simulatio

Updated Aug 3, 2026
Python

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